Kev tsim kho kho qhov muag muaj ntau cov kev siv hauv cov kab lus semiconductor. Hauv lub photolithography tshuab, lub cev kho qhov muag yog lub luag haujlwm rau kev tsom iav ci los ntawm lub teeb ci pom los ntawm lub teeb ci pom los ntawm lub teeb ci ntsa iab thiab ua tiav nws mus rau cov qauv sillicon kom ua rau cov qauv sillicon kom ua rau cov qauv sillicon kom ua rau cov qauv sillicon kom ua rau cov qauv sillicon kom nthuav tawm cov qauv sillicon. Yog li ntawd, tus qauv tsim thiab ua kom zoo dua ntawm cov khoom siv kho qhov muag nyob hauv lub xov tooj photolitography yog ib txoj hauv kev tseem ceeb los txhim kho kev ua haujlwm ntawm lub photolithography tshuab. Cov hauv qab no yog qee cov khoom siv kho qhov muag tau siv hauv photolitograph tshuab:
Projection Lub Hom Phiaj
01 Lub hom phiaj Projection yog lub ntsiab muag tiv thaiv kho tsis zoo hauv cov ntsiab muag, feem ntau muaj cov lo ntsiab muag compve, concave lo ntsiab muag, thiab prisms.
02 Nws muaj nuj nqi yog kom txo cov qauv Circuit Court ntawm lub npog ntsej muag thiab tsom nws rau qhov wafer coated nrog pheboresist.
03 qhov tseeb thiab kev ua tau zoo ntawm lub hom phiaj kev txiav txim siab muaj kev txiav txim siab cuam tshuam rau kev daws teeb meem thiab kev xav tau zoo ntawm lub livy tshuab
Daim iav
01 Tsom iavyog siv los hloov cov kev taw qhia ntawm lub teeb thiab ncaj qha nws rau qhov chaw muaj tseeb.
02 hauv EUV liliograph tshuab, tsom iav tshwj xeeb yog qhov tseem ceeb heev vim tias cov khoom siv yooj yim, yog li cov tsom iav nrog kev cuam tshuam siab yuav tsum tau siv.
03 Qhov chaw saum npoo thiab kev ruaj ntseg ntawm tus tswv tseem muaj kev cuam tshuam zoo rau kev ua haujlwm ntawm lub litool tshuab.
Ntxaij Lim Dej
01 lub lim siv kom tshem tawm cov wavelengths uas tsis xav tau ntawm lub teeb, txhim kho qhov raug thiab zoo ntawm cov photolithography cov txheej txheem.
02 los ntawm kev xaiv lim kom tsim nyog, nws tuaj yeem ua kom muaj txiaj ntsig uas tsuas yog kev txhim kho ntawm lub suab nrov xws li, li kev txhim kho qhov raug thiab muaj kev ruaj ntseg ntawm cov txheej txheem cai.
Prisms thiab lwm yam
Tsis tas li ntawd, lub Lithogy lub tshuab kuj tseem siv tau lwm cov kev ntsuas kho qhov muag kho kho kho kho kho tshiab, xws li prisms, polarizers, kom tau raws li kev ua haujlwm tshwj xeeb. Cov kev xaiv, tsim thiab tsim cov qauv kho kho kho qhov muag thiab cov kev xav tau ua raws li cov txheej txheem siab thiab ua tau zoo ntawm lub lasraphy.
Hauv cov ntsiab lus, daim ntawv thov ntawm kho qhov muag ntawm Lithography lub hom phiaj los txhim kho kev ua tau zoo thiab tsim cov kev txhim kho ntawm microelectronics manufacturing kev lag luam. Nrog kev txhim kho txuas ntxiv ntawm cov thev naus laus zis thev naus laus zis, kev ua kom zoo dua tshiab ntawm cov khoom siv kho qhov muag tseem yuav muaj peev xwm ua tau zoo dua li ua cov chips tom ntej.
Rau kev pom ntau dua thiab cov lus qhia tshaj lij, mus saib peb lub vev xaib ntawmhttps://www.jiujonoptics.com/Xav paub ntau ntxiv txog peb cov khoom lag luam thiab cov kev daws teeb meem.
Lub Sijhawm Post: Jan-02-2025
