Optical tsim muaj ntau yam kev siv hauv semiconductor teb. Nyob rau hauv lub tshuab photolithography, lub tshuab kho qhov muag yog lub luag haujlwm rau tsom lub teeb ci tawm los ntawm lub teeb ci thiab ua rau nws mus rau silicon wafer kom nthuav tawm cov qauv hauv Circuit Court. Yog li ntawd, tsim thiab optimization ntawm optical Cheebtsam nyob rau hauv lub photolithography system yog ib tug tseem ceeb txoj kev los txhim kho cov kev ua tau zoo ntawm lub tshuab photolithography. Cov hauv qab no yog qee yam ntawm cov khoom siv kho qhov muag siv hauv cov tshuab photolithography:
Lub hom phiaj projection
01 Lub hom phiaj ntawm qhov projection yog ib qho tseem ceeb ntawm cov khoom siv kho qhov muag hauv lub tshuab lithography, feem ntau muaj cov lo ntsiab muag nrog rau cov lo ntsiab muag convex, concave lo ntsiab muag, thiab prisms.
02 Nws txoj haujlwm yog kom txo cov qauv hauv Circuit Court ntawm lub npog ntsej muag thiab tsom mus rau wafer coated nrog photoresist.
03 Qhov tseeb thiab kev ua tau zoo ntawm lub hom phiaj projection muaj kev txiav txim siab ntawm kev daws teeb meem thiab kev pom zoo ntawm lub tshuab lithography
Daim iav
01 Daim iavyog siv los hloov cov kev taw qhia ntawm lub teeb thiab coj nws mus rau qhov chaw raug.
02 Hauv EUV lithography tshuab, iav yog qhov tseem ceeb tshwj xeeb vim tias EUV lub teeb tau yooj yim absorbed los ntawm cov ntaub ntawv, yog li iav nrog siab reflectivity yuav tsum tau siv.
03 Qhov tseeb ntawm qhov chaw thiab kev ruaj ntseg ntawm lub reflector kuj muaj kev cuam tshuam zoo rau kev ua haujlwm ntawm lub tshuab lithography.
Cov lim
01 Cov lim dej siv los tshem tawm qhov tsis xav tau ntawm lub teeb, txhim kho qhov tseeb thiab zoo ntawm cov txheej txheem photolithography.
02 Los ntawm kev xaiv cov lim uas tsim nyog, nws tuaj yeem ua kom ntseeg tau tias tsuas yog lub teeb ntawm ib lub wavelength tshwj xeeb nkag mus rau lub tshuab lithography, yog li txhim kho qhov tseeb thiab ruaj khov ntawm cov txheej txheem lithography.
Prisms thiab lwm yam khoom
Tsis tas li ntawd, lub tshuab lithography kuj tseem siv tau lwm cov khoom siv kho qhov muag, xws li prisms, polarizers, thiab lwm yam, kom tau raws li cov kev cai lithography. Kev xaiv, tsim thiab tsim khoom ntawm cov khoom siv kho qhov muag no yuav tsum nruj me ntsis ua raws li cov qauv kev qhia thiab cov kev xav tau los xyuas kom meej qhov siab thiab ua haujlwm ntawm lub tshuab lithography.
Hauv cov ntsiab lus, daim ntawv thov ntawm cov khoom siv kho qhov muag hauv thaj tsam ntawm cov tshuab lithography lub hom phiaj los txhim kho kev ua haujlwm thiab kev ua haujlwm ntawm cov tshuab lithography, yog li txhawb kev txhim kho ntawm microelectronics manufacturing kev lag luam. Nrog rau kev txhim kho txuas ntxiv ntawm lithography thev naus laus zis, kev ua kom zoo thiab kev tsim kho tshiab ntawm cov khoom siv kho qhov muag kuj tseem yuav muaj peev xwm ntau dua rau kev tsim cov chips tiam tom ntej.
Yog xav paub ntxiv txog kev pom thiab cov kws tshaj lij, mus saib peb lub vev xaib ntawmhttps://www.jiujonoptics.com/kom paub ntau ntxiv txog peb cov khoom thiab cov kev daws teeb meem.
Post lub sij hawm: Jan-02-2025
